Motion Control/Vacuum Chamber

Check out our application note on:
The NSLS-II Multilayer Laue Lens Deposition System

System Integration / Turnkey System Capability

CVD/ SDC can assist you with the design, manufacture and installation of your custom process equipment. Whether you are a university, government laboratory or high production manufacturing facility, our 27 years of expertise in manufacturing CVD equipment can provide you with all of the engineering disciplines required to complete a custom turnkey system. Working with our team of specialists will help you to accomplish your goals.

Vacuum Chambers

As an industry leader in the manufacture of high vacuum (HV) and ultra high vacuum (UHV) chambers, our comprehensive engineering, machining and measurement services can build custom chambers to meet your exacting requirements.

• Geometries/Weldments:
- Box
- Round
- Spherical
- Bell Jar: Glass/Metal
- Custom

• Available Materials:
- 304 – 304L SS
- 316 – 316L SS
- 6061 Aluminum
- Inconel
- Quartz

• Machining / Welding / Quartz:
- CNC Machining Centers (Accuracy and Repeatability to .0002”
- Sulfur free machine coolant reduces outgassing
- GTAW Fusion Welding
- Fixture alignment of critical tolerance welded components
- Complete quartz fabrication

• Cleaning:
- Deburring and passivation
- Biodegradable detergent
- De-ionized hot water baths
- Hot oven drying - Customer specified cleaning

• Surface Finishing Options:
- #4 Brush
- Glass Bead Blast
- Electropolish

• Inspection:
- Helium leak check to <10-9 Torr-L/sec

Motion Control

With the increasing demands of UHV & Finite Positioning requirements, we have determined that the preferred solution is to produce a turn-key system. Whether it’s for beamline, magnetron, sputtering or CVD applications, we can provide a custom platform suited for your specifications. We understand the deformations associated with the chamber walls during pump down and we know how vacuum and its associated vibrations can affect finite motion. All designs are customer specific and our engineering staff will work with you to quantify your exact requirements and fully understand your objectives. Pitch, Roll, Yaw and Run-out errors are virtually eliminated through precision manufacturing and assembly. Dynamic compensation can also be employed for in-situ correction. During manufacturing, these stages are inspected from all aspects using interferometers and collimators. Whether you are employing air bearings, crossed roller, or recirculating bearings being driven by piezo, brushless linear or roller screw drives, the end result will achieve the necessary precision.

Software

We can provide a complete supervisory control package that will consolidate vacuum, temperature, gas, and motion control into one station with real time graphing capabilities. A customized graphic control screen will show your system status at a glance. Our data logging allows you to correlate events and eases troubleshooting, tuning, and detecting process deviations. CVD will customize the hardware for your process to incorporate all safety interlocks and interface with your facility alarm systems and other support equipment.

Temperature Control (Heating/Cooling)

A wide variety of heating processes can be integrated into your custom chamber design. Our expertise begins with traditional resistance furnaces ranging from 200 °C up to 1250 °C, and custom graphite resistance furnaces for over 2300 °C in "hot-wall" type configurations.

"Cold-wall" or "Warm-wall" applications can employ Infrared (IR) radiant heating either directly or indirectly to your sample at up to 1250 °C, including Rapid Thermal Processing (RTP) capabilities of, depending on the mass of your sample and holder, over 100 °C/second, .

Temperature capabilities up to 3000 °C can be met using Radio-Frequency (RF) induction heating techniques, even in high-vacuum applications of 1x10E-6 Torr  range, or positive pressure applications to dozens of  Atmospheres. We have proven system designs achieving >200 ATM (3000 psig) with very high temperature processes.

Localized sample or source heating applications can use Pyrolytic Boron Nitride (PBN) encapsulated graphite thin film heaters, assuring high temperature capability (to >1400 °C) in a very small footprint (< 1" diam.) Larger area local heating can be supplied through basic "HotRod" type heating, or through exotic Graphite or Silicon Carbide custom shaped heaters of limitless configurations.

Additionally, chamber walls can be  temperature controlled to aid in  outgassing (to 400 °C), to maintain wall temperature (from <-20 °C to > 200 °C), or to provide cooling to maintain chamber integrity with high temperature in-situ processing.

Frames

Frame construction is customized to the application and determined by process requirements, customer facility constraints and serviceability. Frames are typically manufactured from mild steel box tubing, andare integrated with leveling pads. Additionally, castors can be added along with a myriad of other features including linear and rotational bearings for precision component movement, hoist assemblies, pump mounts, and integrated panels or cabinets for electro-mechanical component mounting. 

Assembly

Along with our preceding capabilities, we can round out your system with the required pumps, gauges, valves, manipulators, and electrical integration as required.

Testing

All systems are tested utilizing a customer approved Acceptance Test Procedure (ATP) generated by CVD/ SDC. All procedures meet the ISO9001 "Quality Management System Requirements" standard.