CVD Equipment Corporation | Low Pressure CVD System | LPCVD

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Low Pressure CVD System (LPCVD)

LPCVD System

LPCVD is used for growth of oxides, nitrides, polysilicon, Si and SiGe epitaxial, SiC, TCO (ZnO), nanowires and many other materials. It makes coating with excellent purity, uniformity and good step coverage.

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