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Customized System

In addition to standard products, CVD Equipment also designs and manufactures customized CVD systems, Chemical Vapor Infiltration (CVI) systems and other surface coating systems to meet our customers special requirements from R&D to production. We also provide motion control vacuum chamber and subsystem design and manufacturing.

Customized System Standard Features Include:

  • Maximum Temperature: 2500 °C
  • Pressure: UHV to High Pressure System
  • Substrate: Wafer and Irregular Object
Please contact us for further details.
Click for larger view customized deluge system
rtp process chamber
hydride vapor phase epi drawing

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