Cluster Tools

CVD Equipment offers a variety of customized cluster tools to meet your process requirements.  A cluster tool system is typically configured with a loadlock chamber, a transfer chamber and two to three process chambers which can be CVD, UHVCVD, PECVD, MOCVD, RTP, Etching, Thermal Evaporation, Sputtering, or E-Beam evaporation. The wafer is transfered between chambers under a vacuum using a robotic arm to prevent exposure to air which avoids oxidation and contamination.

Please contact us for further details.