Bubbler/Flash Evaporator

Bubbler/Flash Evaporator is used for liquid precursor delivery in CVD processing. We manufacture stainless steel and quartz bubblers designed to deliver ultra high-purity precursors to the reaction zone during a fabrication process. Manufactured in a 10/100 clean room ensures product quality and integrity. Bubblers are pneumatically tested 1.0 x 10^-9 ATM*CCS to ensure leak-free service.

Some options include:

• Dual-valve, equipped with fill port and VCRT inlet and outlet valves

• Electropolished 316L stainless steel free of mechanical defects and foreign chemical contaminants

Custom built bubblers to meet your equipment specifications are also available.

Please contact us for further details.