About Our Products

Founded in 1982, CVD Equipment Corporation has been providing research systems and production tools to manufacturers, universities, and laboratories worldwide.  Our products consist of a complete array of Chemical Vapor Deposition (CVD) Systems including: Atmospheric Pressure Chemical Vapor Deposition (APCVD), Low Pressure Chemical Vapor Deposition (LPCVD), Ultra-High Vacuum Chemical Vapor Deposition (UHVCVD), Plasma Enhanced Chemical Vapor Deposition (PECVD) and others.  Systems can be configured as single-tube or multi-tube stacks, multi-chamber cluster tools, or reel-to reel.  We also offer a complete line of products for Atomic Layer Deposition (ALD), Liquid Phase Epitaxial (LPE) processing, Dry Etching, Rapid Thermal Annealing (RTA) and Diffusion Furnaces.  

Custom systems can be fabricated to your specifications. We know how to bring your ideas to fruition from your drawings, or by using our in-house engineering expertise. Our innovative solutions to your requirements come from years of experience, while our extensive Computer Aided Design (CAD) system library helps minimize basic design and engineering time by drawing on concepts and models previously created.  Our CAD system allows you to visualize your system and implement changes prior to fabrication.

Our expertise is unparalleled in controlling temperature, pressure, and gas flow.  System designs allow for several process heating options including resistance, induction or infra-red heating, as well as a wide range of operational pressures from Ultra High Vacuum (UHV) to 50 Atmospheres.  Our equipment is designed and manufactured to meet today’s most stringent safety standards and is equipped with comprehensive hardware and software interlocks to ensure operational safety. 

Additionally, we provide support equipment and parts including gas cabinet, scrubber, quartzware, bubbler and motion control/vacuum chamber. Our strong capability and extensive experience make CVD Equipment Corporation the best place to look for complete solution for your research and production need.