CVD Deposition Equipment for Solar PV

CVD Equipment provides key process equipment used to create different layers to make a solar cell out of a Silicon wafer which includes diffusion, antireflection layer coating, oxidation and Si epitaxial deposition.

We provide to research laboratories continuous R&D efforts in improving solar cell efficiency. We also supply cvd production equipment for large scale solar cell manufacturing at a low cost-of-ownership (COO).

CVD is widely used in solar cell manufacturing from crystalline Si (c-Si) solar cell to thin film solar cell (TFSC). We offer various products for solar cell research and production including Amorphous Silicon (a-Si), micro-crystalline Silicon (μc-Si), Polysilicon, Silicon and Silicon-Germanium Epitaxial, Trichloride Silane (TCS) source quality control, Antireflection (AR) coating like Silicon Nitride and High or Low temperature Silicon Dioxide, Transparent Conductive Oxides (SnO2, ZnO, etc.), Sulfurization/Selenization, Rapid Thermal Annealing, POCl3 and other related diffusion driven processes needed for next generation Silicon and CIGS solar cell process optimization.

• Si wafer based Solar Cell
• Diffusion
• Oxidation
• Si based Thin Film Solar Cell
• a-Si and μc-Si deposition
• Chemical Compound based Thin Film Solar Cell
• Selenization and Sulfurization
• Multi-junction Photovoltaic Cell
• Antireflection Coating
• TCO Coating
• Trichloride Silane Quality Control

Please contact us for further details.