Silicon Carbides

Silicon Carbide (SiC) has been used in abrasive, structure materials, surface coating, high temperature applications, and semiconductor due to its superior properties.

At CVD Equipment, we provide high purity SiC systems for deposition. Our process is done at a temperature higher than 1500°C using RF induction heating, SiH4. Hydrocarbon gases are used as well as precursors.

Please contact us for further details.