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SiCxOy APCVD Thin Film Coating from Solid Silane-Free
Si-Methyl Precursors

Provided by Sixtron Advanced Materials

Na-diffusion barrier, Ar coating for APCVD TCO.

TCO on glass

Top Image: SiCxOy barrier Layer

*Click on each image below to view a larger image and description*

Side View of SiCxOy APCVD Thin Film Coating from Solid Si-Methyl precursors Top View of SiCxOy APCVD Thin Film Coating from Solid Si-Methyl precursors
SiCxOy APCVD Thin Film Coating from Solid Si-Methyl precursors Graph

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