PECVD Systems for a-Si and μc-Si Thin Film Deposition Research

Thin film solar cell is the new generation technology that can reduce the cost of production and installation of solar panels. Amorphous silicon (a-Si) and micro-crystalline Si (μc-Si) thin film based thin film solar panels have made great progress in recent years.

At CVD Equipment, we provide PECVD systems for a-Si and μc-Si thin film deposition research to further improve the efficiency of Si thin film solar cell. We also provide AR coating, TCO coating, RTP systems for thin film solar cell production.

Please contact us for further details.