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Si based Thin Film Solar Cell

Thin film solar cell is the new generation technology that can reduce the cost of production and installation of solar panel. Amorphous silicon (a-Si) and micro-crystalline Si (μc-Si) thin film based thin film solar panel have made great progress in recent years. At CVD Equipment, we provide PECVD system for a-Si and μc-Si thin film deposition research to further improve the efficiency of Si thin film solar cell. We also provide AR coating, TCO coating, RTP systems for thin film solar cell production.

Click for larger view silicon wafer for solar use
polysilicon nitride coated for solar use

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