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Etched Boron ZnO LPCVD Thin Film click here to contact us for more info on our lab services and process equipment sales

Best film thus far optimized for Solar application (high haze): 2.3 µm thick, 1.4 Ω /□, 1.4x10-4 Ω-cm

Etched Boron ZnO LPCVD Thin Film

SiCxOy barrier under layer with high Haze B: ZnO film (2 µm thick)

Etched in 2% HCl for 10 seconds

Note this B: ZnO film has not yet optimized for low Haze to make it more suitable for DISPLAY APPLICATION.

Please contact us for further details.


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