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Our custom equipment is used for leading edge research and high volume production for many applications such as:

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Some of our applications include:

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We also provide access to our Application Lab where Nano/Solar/Energy material processes can be developed in conjunction with First Nano/CVD research scientists.

EasyTube® 2000

easy tube 2000

Turn-key solution for nanomaterial synthesis...
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EasyTube® 3000

easy tube 3000

The most advanced tool for the synthesis of nanotube...
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EasyTube® 6000

easy tube 6000

Offered for carbon nanotubes (CNT), nanowires, oxidation, annealing,...
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LPCVD - High Purity Gas Delivery System

lpcvd gas delivery system

Including mass flow controllers, pneumatically operated valves...
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EasyTube® 3000 - High Purity Graphite Susceptor

Loadlock with a 3 inch wafer on a high purity graphite susceptor

Loadlock with a 3 inch wafer on a high purity graphite susceptor loading...
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LPCVD - End Cap Assembly

lpcvd end cap assembly

Seals the loading end of the process tube for both atmospheric and low pressure processes...
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LPCVD - Vacuum Pump

lpcvd vacuum pump

Piston pump to evaculate the loadlock to equalize pressure with...
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LPCVD - Hot Wall Furnace Chamber

lpcvd boat of wafers

Boat of wafers loading into hot wall furnace chamber...
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UHVCVD - Multi-Chamber Cluster Tool

uhvcvd multi chamber tool

Dual chamber UHVCVD/LPCVD for Si/SiGe epitaxial deposition...
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UHVCVD - Chamber Cluster Tool

uhvcvd chamber cluster tool

Robotic wafer transfer system showing load lock and transfer chamber...
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UHVCVD - Chamber Cluster Tool - Quartz Holder

uhvcvd quartz holder

Substrate loaded onto quartz wafer holder and thermal baffle...
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PECVD - Process Chamber

PECVD Process Chamber

Contains the RF matching unit delivering power to the upper electrode within...
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Metalorganic CVD System

metalorganic cvd system

For compound semiconductors material deposition...
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MOCVD System - Chamber

Metalorganic CVD System - Chamber

Offers stainless steel or quartz chamber...
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Multi-Chamber Cluster System

multi chamber cluster system

Consists of a load lock, transfer chamber, and up to 3 independent process modules...
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Reel to Reel CVD System

Reel to Reel CVD System

Used for deposition of high quality films onto continuous flexible substrate material...
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Reel to Reel - Chamber with Multi-Zone Susceptor

Reel to Reel - Chamber with Multi-Zone Susceptor

Process chamber with multi-zone infrared susceptor heating system...
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Reel to Reel Processing - Hot Chamber

Reel to Reel Processing - Hot Chamber

Flexible film being processed on an infrared heated susceptor...
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Reel to Reel Processing - Infrared Heated Susceptor

Infrared heated susceptor shows portion of Reel to Reel...
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Atomic Layer Deposition System - Process Chamber

Atomic Layer Deposition System - Process Chamber

Deposits ultra-thin uniform layers onto substrates...
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Atomic Layer Deposition System - Multi-head Chamber

Multi-head Chamber

Isolated Showerhead/Heater in our ALD systems...
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Liquid Phase Epitaxial Reactor Growth System (LPE) | LPE/Dipping System

The LPE system is capable of processing a wafer over a uniform flat zone temperature...
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Liquid Phase Epitaxial Reactor System - Loadlock

LPE Loadlock

LPE with loading tray to transfer to and from the glove box...
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Liquid Phase Epitaxial Reactor System - Airgun with Glove Ports

LPE Airgun with Glove Ports

Inert gas spray gun within glove box...
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Liquid Phase Epitaxial Reactor System - 3 Zone Rolling Furnace

LPE 3 Zone Rolling Furnace

Rolling furnace in retracted system.
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Rapid Thermal Processing - Chamber

Rapid Thermal Processing - Chamber

RTP provides extremely rapid heating and cooling of substrates...
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Rapid Thermal Processing - Infrared Lamp

Rapid Thermal Processing - Infrared Lamp

Provides rapid and uniform heating...
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Rapid Thermal Processing - Single Wafer Cantilever Loading Station

Rapid Thermal Processing - Cantilever Loading Station

Wafer on quartz loading arm being introduced into...
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Rapid Thermal Processing - Hot Process Chamber

Hot Process underpower from end view...
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Rapid Thermal Processing - Chamber Lid

chamber lid

Infrared lamp array on the RTP chamber lid...
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Hydrogen Chloride Etching System

Hydrogen Chloride Etching System

Process chamber and operator control station for Hydrogen Chloride Etching Systems...
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Ultra High Speed Portable Deluge System

Series 8000 Ultra High Speed Portable Deluge System

Provides the user with a portable, automatic fire and explosion suppression system for...
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Customized System - RTP Process Chamber

RTP Process Chamber

Infrared Heated Process Chamber....
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Supporting Equipment - Gas Cabinet

Gas Cabinet

Designed to cover a wide range of cylinder gas delivery applications...
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Fabricated Quartzware - Wafer Boats

Fabricated Quartzware - Wafer Boats

Standard and customized wafer boats for various wafer sizes...
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Quartz Shop - Custom Fabricated Quartzware

Quartz Shop - Custom Quartz Fabricated

Custom quartzware being fabricated using a high temperature lathe...
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Quartz Shop - Custom Quartz Fabricated

Quartz Shop - Flame Polishing Quartz

Flame polishing of quartz component to provide the proper finish...
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Bubbler/Flash Evaporator

Bubbler/Flash Evaporator

Stainless Steel Bubbler/Flash Evaporator for delivering saturated gases to...
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Motion Control/Vacuum Chamber - Wafer Transfer Chamber

uhv wafer transfer chamber

CVD's provides a 4 port UHV Wafer Transfer Chamber...
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Motion Control/Vacuum Chamber

Motion Control/Vacuum Chamber

Wafer Transfer Chamber & Sputter Etch Chamber...
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Boron Doped ZnO LPCVD Thin film Coating

Boron Doped ZnO LPCVD Thin film Coating

Boron Doped ZnO deposited at 150 °C by LPCVD process, best film...
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Boron Doped ZnO LPCVD Thin film Coating Graph

Boron Doped ZnO LPCVD Thin film Coating Graph

Transmission & reflection of float glass sheet & boron doped zinc oxide coated...
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Boron Doped ZnO LPCVD Thin film Coating - Side View

Boron Doped ZnO LPCVD Thin film Coating side view

Cross section SEM image of ZnO:B LPCVD thin film coating...
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Boron Doped ZnO LPCVD Thin film Coating - Top View

Boron Doped ZnO LPCVD Thin film Coating top view

SEM image of the surface of a ZnO:B LPCVD thin film coating over SiCxOy thin film...
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Boron Doped ZnO LPCVD Thin film Coating - Top View Lower

Boron Doped ZnO LPCVD Thin film Coating top view lower magnification

ZnO:B LPCVD thin film coating over SiCxOy thin film...
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Transmission spectra for APCVD ZnO:F and LPCVD ZnO:F

Transmission spectra for APCVD ZnO:F and LPCVD ZnO:B coatings

APCVD ZnO:F and LPCVD ZnO:B coatings on soda lime glass...
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Fluorine Doped ZnO APCVD Thin film Coating

Side view of ZnO:F APCVD Thin Film Coating

Side view of ZnO:F APCVD thin film coating over SiCxOy film coated on float glass...
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Fluorine Doped ZnO APCVD Thin film Coating

Magnified side view of ZnO:F APCVD  Thin Film Coating

Magnified side view of ZnO:F APCVD thin film coating over SiCxOy film coated on float glass...
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Fluorine Doped ZnO APCVD Thin film Coating

Front view of ZnO:F  APCVD

Front view of ZnO:F APCVD thin film coating...
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CVDGraphene™ on a 4" Silicon Wafer

cvdgraphene-4inch-wafer

CVDGraphene™ on a 4" silicon wafer using a catalyst interlayer (typically Ni or Cu)...
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CVDGraphene™ (Cu) Copper Foil

cvdgraphene on copper foil

Monolayer CVDGraphene™ on Cu foil 50 – 300 mm x 50 – 250 mm...
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Customer Testimonials

"Since the very first batch of samples we continued to produce long and uniform silicon nanowires..."

-Jie Xiang
Asst. Professor of Electrical and Computer Engineering
Univ. of California, San Diego

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Upcoming Tradeshows

Graphene Innovation Conference (GRAPCHINA)
September 1st – 3rd 2014
Sheraton Ningbo Hotel
Ningbo, China
Booth #A-021

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Latest News

10/20/14
CVD Appoints Dr. Steven Aragon as COO
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10/16/14
CVD Receives 1.7 Million Order
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10/15/14
CVD Reports $27.5 Million in New Orders through Q3
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8/19/14
CVD Receives Multi-Million Dollar Fiber Coating System Order
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8/14/14
CVD Reports 108% Order Increase in Q2
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